TECATRON CMP natural
TECATRON CMP natural is an unfilled PPS plastic (polyphenylene sulfide) optimized specifically for CMP retaining ring applications and is thus part of Ensinger's portfolio for the semiconductor industry. TECATRON CMP natural is characterised by a unique property profile that enables reduced micro scratches and wafer level defects than standard PPS polymer, when used as CMP retaining rings. The former name of TECATRON CMP natural has been TECATRON SE natural.
Facts
Chemical Designation
PPS (Polyphenylensulfide)
Color
beige opaque
Density
1.36 g/cm3
PPS (Polyphenylensulfide)
Color
beige opaque
Density
1.36 g/cm3
Features
- good heat deflection temperature
- good chemical resistance
- resistance against high energy radiation
- high strength
- high dimensional stability
- high stiffness
- high creep resistance
Industries
semiconductor technology
Show/Hide Mechanical Properties
| Description | value | unit | condition | test method |
| Tensile strength | 13,980 | psi | @73°F | ASTM D 638 |
| Modulus of elasticity (tensile test) | 673,400 | psi | @73°F | ASTM D 638 |
| Tensile strength at break | 13,920 | psi | @73°F | ASTM D 638 |
| Elongation at break (tensile test) | 4.2 | % | @73°F | ASTM D 638 |
| Flexural strength | 22,040 | psi | @73°F | ASTM D 790 |
| Modulus of elasticity (flexural test) | 636,000 | psi | @73°F | ASTM D 790 |
| Compression strength | 5,500 | psi | @ 10% strain | ASTM D 695 |
| Compression strength | 19,960 | psi | @ 1% strain | ASTM D 695 |
| Compression modulus | 484,200 | psi | ASTM D 695 | |
| Impact strength (Izod) | 0.55 | ft-lbs/in | @73°F | ASTM D 256 |
| Rockwell hardness | 103.3 | M scale | ASTM D 785 |
Show/Hide Thermal Properties
| Description | value | unit | condition | test method |
| Glass transition temperature | 194 | °F | DIN EN ISO 11357 | |
| Melting temperature | 536 | °F | DIN EN ISO 11357 | |
| Deflection temperature | 239 | °F | @ 264 psi | ISO-R 75 Method A |
| Deflection temperature | 320 | °F | @ 65 psi | ISO-R 75 Method B |
| Service temperature | 500 | °F | short term | |
| Service temperature | 446 | °F | long term | |
| Thermal expansion (CLTE) | 2.8 | *10-5 in/in/°F | ASTM E 831 |
Show/Hide Electrical Properties
| Description | value | unit | condition | test method |
| Dissipation factor | 0.0011 | @ 1 MHz | DIN IEC 60250 | |
| Dielectric constant | 2.8 | @ 1 kHz | DIN IEC 60250 | |
| Dielectric constant | 4.6 | @ 1 MHz | DIN IEC 60250 |
Show/Hide Other Properties
| Description | value | unit | condition | test method |
| Water absorption | 0.02 | % | @ 24 hrs | ASTM D 570 |
| Resistance to hot water/ bases | + | |||
| Resistance to weathering | - | |||
| Flammability (UL94) | V0 | @ 3 mm |
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